Model PK 1250 P E/R I E/P D multiversion plasma etch-reactive ion etch and plasma deposition system





Model PK 2440

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0000790482 / 1981-10-27
Date of Publication:
October 23, 1981
Date of Creation:
1981
Title:
Model PK 2440 : PE/RIE dual plasma and reactive ion etch system : instruction manual.
Copyright Claimant:
Plasma-Therm, Inc.
Names:
Plasma-Therm, Inc.

Copyrights records by Plasma-Therm, Inc.



Model PK 1250 P E/R I E/P D multiversion plasma etch-reactive ion etch and plasma deposition system

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0000857031 / 1982-02-22
Date of Publication:
February 15, 1982
Date of Creation:
1982
Title:
Model PK 1250 P E/R I E/P D multiversion plasma etch-reactive ion etch and plasma deposition system : instruction manual.
Copyright Claimant:
Plasma-Therm, Inc.
Names:
Plasma-Therm, Inc.

Model PK 1241 PE/RIE dual plasma and reactive ion etch system

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0000864285 / 1982-03-04
Date of Publication:
February 26, 1982
Date of Creation:
1982
Title:
Model PK 1241 PE/RIE dual plasma and reactive ion etch system : instruction manual.
Variant title:
Model PK 1241 PE/RIE dual plasma and reactive ion etch system : instruction manual.
Copyright Claimant:
Plasma-Therm, Inc.
Names:
Plasma-Therm, Inc.

Model PK 2430 plasma deposition system

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0000879650 / 1982-03-29
Date of Publication:
March 22, 1982
Date of Creation:
1982
Title:
Model PK 2430 plasma deposition system : instruction manual.
Description:
1 v.
Variant title:
Model PK 2430 plasma deposition system : instruction manual
Copyright Claimant:
Plasma-Therm, Inc.
Names:
Plasma-Therm, Inc.

Model PK 1231 plasma deposition system

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0000897307 / 1982-04-30
Date of Publication:
April 23, 1982
Date of Creation:
1982
Title:
Model PK 1231 plasma deposition system : instruction manual.
Copyright Claimant:
Plasma-Therm, Inc.
Names:
Plasma-Therm, Inc.

Model PK 2410 plasma etch system

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0000921459 / 1982-06-14
Date of Publication:
May 28, 1982
Date of Creation:
1982
Title:
Model PK 2410 plasma etch system : instruction manual.
Description:
1 v.
Copyright Claimant:
Plasma-Therm, Inc.
Names:
Plasma-Therm, Inc.

Hexetch 640 asymmetrical reactive ion etch system

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0001047801 / 1983-01-17
Date of Publication:
December 28, 1982
Date of Creation:
1982
Title:
Hexetch 640 asymmetrical reactive ion etch system : instruction manual.
Description:
1 v.
Copyright Claimant:
Plasma-Therm, Inc.
Names:
Plasma-Therm, Inc.

Waf'r Dep instruction manual

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0001325530 / 1984-01-27
Date of Publication:
December 26, 1983
Date of Creation:
1983
Title:
Waf'r Dep instruction manual : model PD-2411.
Copyright Claimant:
Plasma-Therm, Inc.
Notes:
Cataloged from appl. only.
Names:
Plasma-Therm, Inc.

Model PD-2480 series Waf'r etch plasma etch system instruction manual

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0001449676 / 1984-10-30
Date of Publication:
August 22, 1984
Date of Creation:
1984
Title:
Model PD-2480 series Waf'r etch plasma etch system instruction manual.
Copyright Claimant:
Plasma-Therm, Inc.
Notes:
Cataloged from appl.
Names:
Plasma-Therm, Inc.

In-line waf'r/etch aluminum process system

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0001516382 / 1985-01-16
Date of Publication:
January 15, 1985
Date of Creation:
1985
Title:
In-line waf'r/etch aluminum process system : user's manual & service documentation.
Copyright Claimant:
Plasma-Therm, Inc.
Notes:
Cataloged from appl.
Names:
Plasma-Therm, Inc.

Model PK-1432 PD, Model PK-1441 PE/RIE, Model PK-1450 PE/RIE/PD

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0001601879 / 1985-06-17
Date of Publication:
June 13, 1985
Date of Creation:
1985
Title:
Model PK-1432 PD, Model PK-1441 PE/RIE, Model PK-1450 PE/RIE/PD : instruction manual, plasma deposition/plasma etch, reactive ion etch systems.
Variant title:
Model PK-1432 PD, Model PK-1441 PE/RIE, Model PK-1450 PE/RIE/PD : instruction manual
Copyright Claimant:
Plasma-Therm, Inc.
Notes:
Cataloged from appl.
Names:
Plasma-Therm, Inc.

Hexpak autoloader instruction manual

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0001646585 / 1985-08-08
Date of Publication:
July 15, 1985
Date of Creation:
1985
Title:
Hexpak autoloader instruction manual.
Other Title:
Hexpak autoloader service documentation
Copyright Claimant:
Plasma-Therm, Inc.
Notes:
Cataloged from appl.
Includes Hexpak autoloader service documentation.
Names:
Plasma-Therm, Inc.

In-line Waf'r/Etch 200mm R & D

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0001716626 / 1985-12-11
Date of Publication:
December 9, 1985
Date of Creation:
1985
Title:
In-line Waf'r/Etch 200mm R & D : user's manual/service documentation.
Copyright Claimant:
Plasma-Therm, Inc.
Notes:
Cataloged from appl.
Names:
Plasma-Therm, Inc.

In-line Waf'r/strip user's manual

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0001812243 / 1986-04-28
Date of Publication:
July 28, 1985
Date of Creation:
1985
Title:
In-line Waf'r/strip user's manual.
Copyright Claimant:
Plasma-Therm, Inc.
Notes:
Cataloged from appl.
Names:
Plasma-Therm, Inc.

Model HFS T 502S, RF generator

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0001997413 / 1987-02-04
Date of Publication:
December 18, 1986
Date of Creation:
1986
Title:
Model HFS T 502S, RF generator.
Description:
2 v.
Copyright Claimant:
Plasma-Therm, Inc.
Notes:
Includes service documentation & installation, operation, and maintenance manual.
Names:
Plasma-Therm, Inc.

700 series Waf'r/Batch Plasma processing system service documentation

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0002080783 / 1987-05-21
Date of Publication:
February 12, 1987
Date of Creation:
1987
Title:
700 series Waf'r/Batch Plasma processing system service documentation : vol. one[-two]
Description:
3 v.
Variant title:
700 series Waf'r/Batch Plasma processing system service documentation : vol. one[-two]
Copyright Claimant:
Plasma-Therm, Inc.
Notes:
Includes dual chamber user's manual.
Names:
Plasma-Therm, Inc.

In-line waf'r/etch 200mm aluminum process system 6000/SE008 service documentation

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0002152865 / 1987-09-14
Date of Publication:
June 25, 1987
Date of Creation:
1987
Title:
In-line waf'r/etch 200mm aluminum process system 6000/SE008 service documentation.
Description:
1 v.
Copyright Claimant:
Plasma-Therm, Inc.
Authorship on Application:
compilation of drawings & parts lists: Plasma-Therm, Inc., employer for hire.
Names:
Plasma-Therm, Inc.

3082C Waf'r/Batch user's manual

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0002187900 / 1987-10-22
Date of Publication:
October 6, 1987
Date of Creation:
1987
Title:
3082C Waf'r/Batch user's manual.
Application Title:
3082 Waf'r/Batch user's manual with 3082C Waf'r/Batch service documentation.
Description:
2 v.
Copyright Claimant:
Plasma-Therm, Inc.
Notes:
Includes service documentation manual.
Names:
Plasma-Therm, Inc.

WAF'R/batch 70 series plasma processing systems service documentation

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0002345301 / 1988-04-27
Date of Publication:
November 2, 1987
Date of Creation:
1987
Title:
WAF'R/batch 70 series plasma processing systems service documentation.
Description:
2 v.
Copyright Claimant:
Plasma-Therm, Inc.
Notes:
Includes user's manual.
Names:
Plasma-Therm, Inc.

Inline secs I & II software reference manual

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0002423947 / 1988-10-13
Date of Publication:
October 3, 1988
Date of Creation:
1988
Title:
Inline secs I & II software reference manual.
Description:
1 v.
Copyright Claimant:
Plasma-Therm, Inc.
Authorship on Application:
compilation of text, charts & tables: Plasma-Therm, Inc., employer for hire.
Names:
Plasma-Therm, Inc.

WAF'R/BATCH 700 dual chamber

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0002423948 / 1988-10-13
Date of Publication:
October 5, 1988
Date of Creation:
1988
Title:
WAF'R/BATCH 700 dual chamber : secs I & II software reference manual.
Description:
1 v.
Variant title:
WAF'R/BATCH 700 dual chamber : secs I & II software reference manual.
Copyright Claimant:
Plasma-Therm, Inc.
Authorship on Application:
compilation of text, charts & tables: Plasma-Therm, Inc., employer for hire.
Names:
Plasma-Therm, Inc.

Shuttlelock 700

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0002423949 / 1988-10-13
Date of Publication:
October 6, 1988
Date of Creation:
1988
Title:
Shuttlelock 700 : secs I & II software reference manual.
Description:
1 v.
Variant title:
Shuttlelock 700 : secs I & II software reference manual.
Copyright Claimant:
Plasma-Therm, Inc.
Authorship on Application:
compilation of text, charts & tables: Plasma-Therm, Inc., employer for hire.
Names:
Plasma-Therm, Inc.

WAF'R/BATCH 7000

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0002423950 / 1988-10-13
Date of Publication:
October 3, 1988
Date of Creation:
1988
Title:
WAF'R/BATCH 7000 : secs I & II software reference manual.
Description:
1 v.
Variant title:
WAF'R/BATCH 7000 : secs I & II software reference manual.
Copyright Claimant:
Plasma-Therm, Inc.
Authorship on Application:
compilation of text, charts & tables: Plasma-Therm, Inc., employer for hire.
Names:
Plasma-Therm, Inc.

SL700 shuttlelock plasma processing system

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0002477113 / 1989-01-10
Date of Publication:
December 14, 1988
Date of Creation:
1988
Title:
SL700 shuttlelock plasma processing system.
Application Title:
SL 700 shuttlelock plasma processing system: user's manual with service documentation.
Imprint:
Voorhees, NJ : Plasma-Therm, c1989.
Description:
3 v.
Copyright Claimant:
Plasma-Therm, Inc.
Names:
Plasma-Therm, Inc.

MPT/SCM III system control module

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0002579895 / 1989-04-21
Date of Publication:
January 27, 1989
Date of Creation:
1989
Title:
MPT/SCM III system control module.
Application Title:
MPT/SCMIII system control module.
Description:
2 v.
Copyright Claimant:
Plasma-Therm, Inc.
Notes:
Includes operation & service manual & service documentation.
Names:
Plasma-Therm, Inc.

WAF'R/BATCH 7000 series

Type of Work:
Non-dramatic literary work
Registration Number / Date:
TX0002701329 / 1989-11-29
Date of Publication:
November 27, 1989
Date of Creation:
1989
Title:
WAF'R/BATCH 7000 series : plasma processing system.
Description:
2 v.
Variant title:
WAF'R/BATCH 7000 series : plasma processing system.
Copyright Claimant:
Plasma-Therm, Inc.
Notes:
Includes user's manual & service documentation.
Names:
Plasma-Therm, Inc.

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